Charged particle spectrometer and detector therefor
US7470901B2 · kind B2 · utility
7Cited by
34References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 4, 2003 |
| Grant date | Dec 30, 2008 |
| Priority date | — |
| Expiry date | Aug 2, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/48
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle (e.g. photoelectron) spectrometer is operable in a first mode to produce an energy spectrum relating to the composition of a sample being analysed, and in a second mode to produce a charged particle image of the surface of the sample being analysed. A detector is used to detect charged particles produced in both modes of operation. A method of operation of the spectrometer includes the step of selecting which of said first and second modes to use and the detector being operated accordingly.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.