Apparatus for measuring numbers of particles and method thereof
US7471076B2 · kind B2 · utility
Assignees
Inventor
Key dates
| Filing date | Feb 14, 2005 |
| Grant date | Dec 30, 2008 |
| Priority date | — |
| Expiry date | Feb 14, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N15/0266
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention discloses apparatus and method for rapidly and easily measuring the numbers and size distribution of low concentration particles which exist in a clean space such as a clean room. The apparatus and method according to the present invention measures the numbers of particles by charging particles to a monopolarity, collecting the particles by applying a voltage to an electrode and attaching the charged particles of a certain size or less thereto, separating the charged particles of the certain size or more according to size by the particle separating ducts. The apparatus for measuring the number of particles according to the present invention makes it possible to obtain a size distribution of particles in the air by a single measurement and to rapidly and easily measure it even though the number of the particles in the air is small.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.