Flexures
US7471441B1 · kind B1 · utility
1Cited by
25References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 9, 2006 |
| Grant date | Dec 30, 2008 |
| Priority date | — |
| Expiry date | Nov 16, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Various embodiments of a MEMs structure including flexures movably supporting a reflective face are disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.