Fast-response micro-mechanical devices
US7471445B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 29, 2005 |
| Grant date | Dec 30, 2008 |
| Priority date | — |
| Expiry date | Nov 3, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface, and a substrate portion comprising a cavity having an opening on the lower surface, a substrate comprising an upper surface, a hinge support post in connection with the substrate, and a hinge component supported by the hinge support post and in connection with the mirror plate, and one or more landing tips configured to contact the lower surface of the mirror plate to limit rotation of the mirror plate. The hinge component includes a protrusion that is anchored in a hole in the top surface of the hinge support post and the hinge component is configured to extend into the cavity to facilitate rotation of the mirror plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.