Ultraviolet laser system and method having wavelength in the 200-nm range
US7471705B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 9, 2006 |
| Grant date | Dec 30, 2008 |
| Priority date | — |
| Expiry date | Nov 21, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/3507
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus and method applicable for generating ultraviolet laser light having a wavelength in the 200-nm range and/or 250-nm range; in some embodiments, using a single fiber laser pump source (in some embodiments, a pulsed source). In some embodiments, the invention provides methods of generating 250-nm or 200-nm photons using a mode-locked 1000-nm fiber laser and efficient 4th/5th harmonic frequency up-conversion. In other embodiments, the invention uses continuous wave (cw) single-frequency fiber lasers and external resonant frequency conversion. In still other embodiments, the invention uses cw single-frequency optically-pumped semiconductor lasers (OPSLs) and electrically driven vertical-cavity surface-emitting lasers (VCSELs) and externally resonant frequency conversion. All of these produce both of the ultraviolet wavelengths of interest
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.