Waveguiding structures with embedded microchannels and method for fabrication thereof
US7471866B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 2005 |
| Grant date | Dec 30, 2008 |
| Priority date | — |
| Expiry date | Jun 25, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/12176
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides a method for fabricating planar waveguiding structures with embedded microchannels. The method includes the step of depositing, over a planar template having at least one indented feature comprising a ridge of a first optical material and a narrow trench adjacent thereto, a second optical material, and the step of subsequent annealing thereof, so that an embedded hollow microchannel forms within the trench. The method provides planar structures wherein the ridge and the embedded microchannel cooperate to form an optical waveguiding structure having a waveguiding direction collinear with the embedded microchannel. Embodiments of the method for forming microfluidic devices integrating ridge waveguides with hollow microchannels having surface access points for fluid delivery, and for forming photonic crystals, are disclosed together with corresponding device embodiments.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.