Resistance-heated vaporizer boat
US7471884B2 · kind B2 · utility
1Cited by
6References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 19, 2003 |
| Grant date | Dec 30, 2008 |
| Priority date | — |
| Expiry date | May 23, 2025 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/243
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Resistance-heated ceramic vaporizer boat (10) comprising an elongated vaporizer body having an upper side (1) and a lower side (2) being parallel to each other, and the vaporizer body having plane lateral side surfaces (3) being non-parallel to each other, wherein each of said lateral side surfaces (3) is inclined by an angle of 45° with respect to the upper side (1). Preferably, the end portions at the longitudinal ends of the vaporizer body are reduced, at the lower side (2) thereof, to a predetermined partial thickness (t), whereby a cavity at the upper side (1) of the vaporizer body can be omitted.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.