Planar inductor using liquid metal MEMS technology
US7477123B2 · kind B2 · utility
11Cited by
4References
18Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 21, 2005 |
| Grant date | Jan 13, 2009 |
| Priority date | — |
| Expiry date | Oct 11, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D84/00
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Using MEMS device design and fabrication techniques, liquid metal inductors can be formed. Because of the common fabrication techniques, liquid metal inductors can be more easily integrated with certain MEMS microswitches.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.