Projection exposure apparatus and method for producing a printed circuit board
US7477354B2 · kind B2 · utility
0Cited by
5References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 20, 2005 |
| Grant date | Jan 13, 2009 |
| Priority date | — |
| Expiry date | Sep 28, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05K2203/056
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A projection exposure apparatus and a method for producing a printed circuit board wherein, the whole pattern including pieces 10 and coupons 12 to be exposed on a print circuit board 2 is depicted on a photo mask 1 divided in six areas by divide line 19, the exposure will be made with respect to the each divided area of the photo mask 1 mounted on a movable photo mask stage 5 with using a masking device 3 masking other area than the exposing area.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.