Scanning microscope comprising a confocal slit scanner for imaging an object

US7477380B2 · kind B2 · utility

Assignee

• LEICA MICROSYSTEMS CMS GMBH · DE

Inventors

• Werner Knebel · Kronau, DE
• Holger Birk · Meckesheim, DE
• Rafael Storz · Heidelberg, DE

Key dates

• Filing date: Sep 23, 2003
• Grant date: Jan 13, 2009
• Expiry date: Dec 28, 2023

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B21/0084
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A scanning microscope for imaging an object includes a light source and a spectrally selective detection device. An illumination beam path extends from the light source to the object. A detection beam path extends from the object to the detection device. A spectrally selective element useable to select light from the light source is provided. The spectrally selective element is useable to mask out of the detection beam path the selected light from the light source reflected or scattered on the object. An illumination slit diaphragm is disposed in the illumination beam path and configured to generate a linear illumination pattern in a region of the object. A detection slit diaphragm is disposed in the detection beam path and configured to detect the light coming from the linear illumination region from a focal plane so as to provide a confocal slit scanner.