Piezoelectric element, method of manufacturing the same, liquid-jet head, method of manufacturing the same, and liquid-jet apparatus
US7479728B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 2, 2006 |
| Grant date | Jan 20, 2009 |
| Priority date | — |
| Expiry date | Nov 3, 2026 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14491
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
The present invention is to provide a piezoelectric element, a method of manufacturing the same, a liquid-jet head, a method of manufacturing the same, and a liquid-jet apparatus, all of which prevent an inter-layer detachment in a lower electrode. A method of manufacturing a piezoelectric element, comprising the steps of: forming, on a substrate, a lower electrode configured of a plurality of layers which includes a metal layer with a limit thickness of 20 nm at least in its uppermost layer, the metal layer essentially containing iridium; forming a multi-layered piezoelectric layers by means of performing a piezoelectric film forming step a plurality times, the piezoelectric film forming step including an applying step of applying a piezoelectric precursor film onto the lower electrode, a drying step of drying the piezoelectric precursor film which has been applied thereon through the applying step, a degreasing step of degreasing the piezoelectric precursor film which has been dried through the drying step, and a baking step of making the piezoelectric precursor film, which has been degreased through the degreasing step, into a piezoelectric film by baking and crystallizing the p…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.