Micromirror system with electrothermal actuator mechanism
US7480089B2 · kind B2 · utility
3Cited by
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28Claims
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Assignee
Inventor
Key dates
| Filing date | Apr 25, 2006 |
| Grant date | Jan 20, 2009 |
| Priority date | — |
| Expiry date | Feb 24, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0866
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The disclosed embodiments combine an electrothermal actuator system with an electrostatic attraction system, in order to orient bistable micromirrors in digital micromirror devices (DMDs). The micromirror, pivotally supported, can switch between two orientations. While typical DMD systems use electrostatic electrodes to orient the micromirror, stiction forces can restrict micromirror motion, affecting optical performance. The disclosed embodiments use an electrothermal actuation system to mechanically assist the electrodes, overcoming stiction without the need for a high-voltage reset pulse.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.