Electrostatic actuator including a switching circuit which selectively sets one of a moving mode and first and second holding modes and driving method therefor
US7482728B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 23, 2005 |
| Grant date | Jan 27, 2009 |
| Priority date | — |
| Expiry date | Jan 19, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04N23/687
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The present invention provides an electrostatic actuator having a small power consumption and also provides a driving method thereof. The electrostatic actuator comprises first and second substrates having first and second stator electrodes formed thereon, respectively, and a movable section arranged between the first and second stator electrodes. The movable section has first and second surfaces that are positioned to face the first and second stator electrodes, respectively. In first and second moving modes, the movable section is slightly moved between the first and second substrates in response to the signal voltage from the driving circuit. Also, in the holding mode, the movable section is held by one of the first and second stator electrodes and, under this condition, at least one of the stator electrode holding the movable section and the movable section held by the stator electrode is left electrically floating.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.