Performance analyses of micromirror devices
US7483126B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 23, 2004 |
| Grant date | Jan 27, 2009 |
| Priority date | — |
| Expiry date | Sep 23, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N21/95
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention provides a method and apparatus for evaluating the product quality and performances of micromirror array devices through measurements of the electromechanical responses of the individual micromirrors to the driving forces of electric fields. The electromechanical responses of the micromirrors according to the present invention are described in terms of the rotational angles associated with the operational states, such as the ON and OFF state angles of the ON and OFF state when the micromirror array device is operated in the binary-state mode, and the response speed (i.e. the time interval required for a micromirror device to transit form one state to another) of the individual micromirrors to the driving fields.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.