Micromirror device and method for making the same
US7483198B2 · kind B2 · utility
5Cited by
13References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 11, 2005 |
| Grant date | Jan 27, 2009 |
| Priority date | — |
| Expiry date | Jan 25, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B5/08
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed herein is a micromirror device having in-plane deformable hinge to which a deflectable and reflective mirror plate is attached. The mirror plate rotates to different angles in response to an electrostatic field established between the mirror plate and an addressing electrode associated with the mirror plate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.