Optical tunable filter and method of manufacturing the same
US7483211B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Jan 26, 2006 |
| Grant date | Jan 27, 2009 |
| Priority date | — |
| Expiry date | Nov 11, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/001
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical tunable filter has a fixed substrate having a first recess formed therein and a movable substrate bonded to the fixed substrate. The movable substrate includes a movable portion having an opening formed at a location facing the first recess and a support portion for supporting the movable portion so that the movable portion can be displaced. The optical tunable filter also has a light-transmittable substrate bonded to the movable portion, a fixed reflection film formed on a bottom of the first recess, and a movable reflection film formed on a surface of the light-transmittable substrate. The optical tunable filter includes an interference gap formed between the fixed reflection film and the movable reflection film. The optical tunable filter also includes an actuator operable to displace the movable portion relative to the fixed substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.