Patent · US Expired

Optical component having an improved transient thermal behavior and method for improving the transient thermal behavior of an optical component

US7483223B2 · kind B2 · utility

9Cited by

3References

20Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Wilhelm Egle · Aalen, DE
Wolfgang Hafner
Willi Anderl · Wertingen, DE
Ulrich Bingel · Michelfeld, DE
Holger Muenz · Aalen, DE
Thomas Neidhardt · Heidenheim, DE

Key dates

Filing date	Oct 6, 2005
Grant date	Jan 27, 2009
Priority date	—
Expiry date	May 12, 2026

Classification

Technology area (CPC G)Physics
CPC primaryG21K2201/067
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical component comprises at least one optically effective optical element which heats up when irradiated with light, and at least one holding element for the at least one optical element for holding the at least one optical element in a carrier structure, wherein the at least one optical element is connected to the at least one holding element in heat conducting fashion, and wherein the at least one holding element is at least partially provided with an active cooling system for carrying off heat from the at least one optical element. Additionally or alternatively, a temperature control device is provided which controls the temperature of at least a part of the mount of the optical element.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.