Fabricating method of field emission triodes
US7485024B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 12, 2005 |
| Grant date | Feb 3, 2009 |
| Priority date | — |
| Expiry date | Apr 27, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2201/30469
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A fabricating method of field emission triodes is provided. First, a cathode conductive layer, an insulator layer, and a gate layer are formed on a substrate. An opening is formed in the insulator layer and the gate layer to expose a portion of the cathode conductive layer. A metal layer is formed on the cathode conductive layer. A first anodization is performed so as to form a first metal anodization layer from a portion of the metal layer. After the first metal anodization layer is removed, a second metal anodization layer having a plurality of pores is formed. Thereafter, a catalyst layer is formed in the pores. Then, a plurality of carbon nanotubes are formed in the pores.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.