Method for removing organic electroluminescent residues from a substrate

US7485580B2 · kind B2 · utility

Assignee

• AIR PRODUCTS AND CHEMICALS, INC. · US

Inventors

• Andrew David Johnson · Doylestown, US
• Peter J. Maroulis · Mertztown, US
• Mark Sistern · Audlem, GB
• Martin J. Plishka · Apache Junction, US
• Steven Rogers · Leesburg, US
• John B. Dickenson · Fogelsville, US

Key dates

• Filing date: Sep 12, 2006
• Grant date: Feb 3, 2009
• Expiry date: Sep 12, 2026

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10K71/40

Abstract

A process for removing organic electroluminescent residues from a substrate is described herein. The process includes the steps of providing a process gas comprising a fluorine-containing gas, optionally an oxygen-containing gas, and optionally an additive gas; activating the process gas in a remote chamber using at least one energy source to provide reactive species; and contacting the surface of the substrate with the reactive species to volatilize and remove the organic electroluminescent residue from the surface.