Patent · US Active

Optical measuring head

US7486394B2 · kind B2 · utility

6Cited by

7References

21Claims

0Family size

Assignee

CARL MAHR HOLDING GMBH · DE

Inventors

Peter Lehmann · Oebisfelde, DE
Peter Lücke · Karlsruhe, DE
Jurgen Mohr · Eppingen, DE
Carlos Javier Moran-Iglesias · Blankenloch, DE
Wolfgang Osten · Lilienthal, DE
Aiko Ruprecht · Wedel, DE
Sven Schönfelder · Mössingen, DE

Key dates

Filing date	Sep 2, 2006
Grant date	Feb 3, 2009
Priority date	—
Expiry date	Jan 28, 2027

Classification

Technology area (CPC G)Physics
CPC primaryG01B2210/50
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A measuring head (4) according to the invention comprises the combination of a zone lens (26), which is preferably a diffractive lens, with a hemispherical lens (23) or a GRIN lens (33). This represents a concept capable of miniaturization, resulting in very slender measuring heads (4) having a high numeric aperture and, accordingly, leads to the best resolution capacity. Such measuring heads are insensitive to angular errors as concerns the orientation of the measuring head to the surface to be measured or to an oblique positioning of the surface relative to the optical axis of the measuring head.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.