Method for generating a control output for a position control loop

US7487069B2 · kind B2 · utility

Assignee

• Heidelberg Instruments Mikrotechnik GMBH · DE

Inventors

• Sven Vogler · Heidelberg, DE
• Roland Kaplan · Heidelberg, DE
• Robert Weikert · Achern, DE
• Roelof Wijnaendts-Van-Resandt · Bad Schönborn, DE

Key dates

• Filing date: Sep 27, 2007
• Grant date: Feb 3, 2009
• Expiry date: Sep 27, 2027

Classification

• Technology area (CPC G): Physics
• CPC primary: G01D5/30
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method for optically detecting the position of a moveable test object (10), especially a mirror or reflector, in which a measuring beam (6) produced by a light source (2) is reflected by the test object (10 and reaches a position-sensitive light detector (12) which carrier out a conversion into information corresponding to the position of the test object (10). The invention enables the position of mirrors, especially rotating mirrors, to be quickly measured optically using a simple optical construction. The measuring beam (6) is focused onto the light detector (12) by an optical system (8). A signal corresponding to the geometric center or the maximum (I0) of the intensity distribution of the focused measuring spot is determined based on the measured values obtained by the light detector (12).