Nozzle device, film forming apparatus and method using the same, inorganic electroluminescence device, inkjet head, and ultrasonic transducer array
US7488389B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Mar 21, 2005 |
| Grant date | Feb 10, 2009 |
| Priority date | — |
| Expiry date | Jul 13, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB05D3/12
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A film forming apparatus by which uniform and large area films can be formed according to the AD method. The film forming apparatus includes: a film forming chamber; a substrate holder located in the film forming chamber, for holding a substrate on which a structure is to be formed; an exhaust pump for exhausting an interior of the film forming chamber; an aerosol generating unit for generating an aerosol by blowing up a raw material powder placed in a container with a gas; a carrier pipe for introducing the generated aerosol into the film forming chamber; a nozzle for spraying the aerosol introduced via the carrier pipe toward the substrate; and a control unit for chaotically changing a relative position of the substrate held by the substrate holder and the nozzle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.