Patent · US Expired

Component with a piezoelectric functional layer

US7489067B2 · kind B2 · utility

12Cited by
12References
16Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 6, 2004
Grant dateFeb 10, 2009
Priority date
Expiry dateDec 17, 2024

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10N30/501
  • WIPO fieldBasic communication processes
  • WIPO sectorElectrical engineering

Abstract

An electrical component includes a substrate, a first electrode layer, a structured growth layer that is thinner than the first electrode layer, a piezoelectric layer, and a second electrode layer. The growth layer is on the first electrode layer, the growth layer is structured relative to the first electrode layer, and the growth layer has a smaller surface area than the first electrode layer. The growth layer may be selected to support ordered growth relative to the piezoelectric layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.