Component with a piezoelectric functional layer
US7489067B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2004 |
| Grant date | Feb 10, 2009 |
| Priority date | — |
| Expiry date | Dec 17, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/501
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An electrical component includes a substrate, a first electrode layer, a structured growth layer that is thinner than the first electrode layer, a piezoelectric layer, and a second electrode layer. The growth layer is on the first electrode layer, the growth layer is structured relative to the first electrode layer, and the growth layer has a smaller surface area than the first electrode layer. The growth layer may be selected to support ordered growth relative to the piezoelectric layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.