Patent · US Active

Apparatus for inspecting a disk-like object

US7489394B2 · kind B2 · utility

4Cited by

6References

4Claims

0Family size

Assignee

Vistec Semiconductor Systems GmbH · DE

Inventors

Joachim Wienecke · Jena, DE
Thomas Krieg · Erbach, DE

Key dates

Filing date	Mar 28, 2006
Grant date	Feb 10, 2009
Priority date	—
Expiry date	Nov 18, 2026

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/8427
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An apparatus for inspecting a disk-like object comprising at least one first module for inspecting a surface of the disk-like object and at least one second module insertable in the apparatus. The at least one second module is arranged to inspect a different element of the disk-like object than the surface of the disk-like object.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.