System and method for sensing differential pressure
US7490519B2 · kind B2 · utility
29Cited by
9References
9Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 30, 2005 |
| Grant date | Feb 17, 2009 |
| Priority date | — |
| Expiry date | Jan 21, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0019
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A differential pressure sensing system is provided. The sensing system includes a membrane layer having a channel extending diametrically therein, and including one or more cavities provided radially outbound of the channel and at least one resonant beam disposed in the channel and configured to oscillate at a desired frequency. The system further includes sensing circuitry configured to detect oscillation of the at least one resonant beam indicative of deformation in the membrane layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.