MEMS microdetonator/initiator apparatus for a MEMS fuze
US7490552B1 · kind B1 · utility
3Cited by
8References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 31, 2007 |
| Grant date | Feb 17, 2009 |
| Priority date | — |
| Expiry date | Sep 14, 2027 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF42C15/40
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A MEMS apparatus having a substrate layer, a device layer and an intermediate oxide layer joining them. A slider is formed in the device layer and includes an enlarged end portion. A walled chamber having a hollow interior in which is positioned a microdetonator is formed in the substrate layer beneath the enlarged end portion and is secured to it by the oxide layer. A drive is operable to move the slider, and with it, the walled chamber, from an initial position to a final position. When in the final position an initiator is operable to initiate the microdetonator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.