Transport device, in particular for use in a vacuum chamber

US7490714B2 · kind B2 · utility

Assignee

• VON ARDENNE Anlagentechnik GmbH · DE

Inventors

• Jochen Krause · Frankfurt, DE
• Michael Hofmann · Taufkirchen, DE

Key dates

• Filing date: Apr 26, 2006
• Grant date: Feb 17, 2009
• Expiry date: Jan 13, 2027

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B65G2249/02
• WIPO field: Handling
• WIPO sector: Mechanical engineering

Abstract

A transport device is particularly suitable for use in a vacuum chamber for the transportation of a flat substrate through the vacuum chamber and comprises a belt conveyor with at least one flexible infinite belt guided around at least two deflection rollers, whereby at least one deflection roller can be driven, and further including a filling element positioned for filling at least the space contained by the infinite belt or belts. The air volume enclosed by the transport device is significantly reduced in comparison to conventional solutions by incorporating the filling element in the transport element. As a result, the volume to be evacuated from the vacuum chamber is reduced. The vacuum chamber can be evacuated and ventilated more rapidly. Nevertheless, the transport device is constructed so as to be maintenance-friendly. Maintenance work can be carried out easily, because the infinite belts and the deflection rollers are easily accessible. The transport device can also easily be upgraded in the case of existing vacuum chambers.