Method of driving droplet jetting head, droplet jetting apparatus, and device manufacturing method
US7490920B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jan 7, 2005 |
| Grant date | Feb 17, 2009 |
| Priority date | — |
| Expiry date | Oct 19, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/16526
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A method of driving a droplet jetting head having cavities for containing a predetermined liquid, piezoelectric elements, each for generating pressure in each cavity in accordance with an applied driving signal, and nozzle openings, from each of which the liquid compressed by each piezoelectric element is jetted as a droplet. The method includes driving the droplet jetting head by applying to one or more of the piezoelectric elements a forced jetting driving signal for forcedly jetting the liquid of half of an excluded volume, which is a maximum quantity removable from the cavity by compression using the piezoelectric element, from the nozzle opening. The clogged nozzle opening can be effectively cleared and clogging can be rapidly removed, so that the number of times for cleaning of the head is decreased and degradation in performance of the droplet jetting head, such as reduction in repellency of the liquid, does not occur.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.