Apparatus for inspecting alignment film and method for fabricating liquid crystal display device using the same
US7492437B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 23, 2005 |
| Grant date | Feb 17, 2009 |
| Priority date | — |
| Expiry date | Apr 26, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6715
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An apparatus for inspecting an alignment film and a method for fabricating a liquid crystal display device using the same are disclosed. By changing a spraying structure of a steam inspecting unit to check whether an alignment film is defective or not, a water splash phenomenon can be prevented and spraying can be performed uniformly on a large-scale glass. The apparatus for inspecting an alignment film comprises a first steam generating unit for generating first steam; a second steam generating unit for generating second steam by using the first steam as a heat source; and a steam spraying unit for spraying the second steam onto a substrate of a substrate to inspect an alignment film formed on the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.