Probe card and temperature stabilizer for testing semiconductor devices
US7495458B2 · kind B2 · utility
4Cited by
8References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 17, 2006 |
| Grant date | Feb 24, 2009 |
| Priority date | — |
| Expiry date | May 17, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/44
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
One aspect of the invention provides an apparatus that includes a probe card having probe needles associated therewith. A temperature stabilizer element is couplable to the probe card. The temperature stabilizer is configured to either raise or lower a temperature of the probe needles to reduce movement of the probe needles.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.