Impedance matching apparatus
US7495524B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 19, 2007 |
| Grant date | Feb 24, 2009 |
| Priority date | — |
| Expiry date | Sep 20, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03F1/565
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
An impedance matching apparatus has: a storing portion 70 for previously storing, for plural positions which can be taken by a movable portion of a variable impedance element, allowable power values respectively corresponding to the plural positions of the movable portion; and an abnormality determining portion 80 for determining an allowable power value based on the present positions of the movable portion supplied from position detecting portions 41, 42 and the allowable power values stored in the storing portion 70, for comparing the allowable power value with an input power value, and for determining that it is abnormal when the input power value is larger than the allowable power value. Accordingly, the calculation load during the matching operation can be reduced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.