Droplet discharging apparatus and method, film manufacturing apparatus and method, device manufacturing method, and electronic equipment
US7497541B2 · kind B2 · utility
4Cited by
16References
33Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 30, 2003 |
| Grant date | Mar 3, 2009 |
| Priority date | — |
| Expiry date | Jun 22, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/04593
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An apparatus discharges a discharge liquid in the form of droplets from apertures by mechanically deforming piezoelectric elements by a normal drive signal. The droplets are discharged from the apertures by a cooling drive signal, which is different from the normal drive signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.