Method and apparatus for simultaneous detection and measurement of charged particles at one or more levels of particle flux for analysis of same
US7498585B2 · kind B2 · utility
5Cited by
17References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 6, 2006 |
| Grant date | Mar 3, 2009 |
| Priority date | — |
| Expiry date | Aug 2, 2027 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/26
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A charged particle detector and method are disclosed providing for simultaneous detection and measurement of charged particles at one or more levels of particle flux in a measurement cycle. The detector provides multiple and independently selectable levels of integration and/or gain in a fully addressable readout manner.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.