Patent · US Expired

Semiconductor structure for isolating integrated circuits of various operating voltages

US7498653B2 · kind B2 · utility

2Cited by
1References
18Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 12, 2005
Grant dateMar 3, 2009
Priority date
Expiry dateNov 12, 2025

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D84/83
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor structure for isolating a first circuit and a second circuit of various operating voltages includes a first isolation ring surrounding the first and second circuits on a semiconductor substrate. A buried layer continuously extending underneath the first and second circuits is formed on the semiconductor substrate, wherein the buried layer interfaces with the first isolation ring for isolating the first and second circuits from a backside bias of the semiconductor substrate. An ion enhanced isolation layer is interposed between the buried layer and well regions on which devices of the first and second circuits are formed, wherein the ion enhanced isolation layer is doped with impurities of a polarity type different from that of the buried layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.