Delivering particulate material to a vaporization zone
US7501151B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 20, 2005 |
| Grant date | Mar 10, 2009 |
| Priority date | — |
| Expiry date | Apr 27, 2027 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/246
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for vaporizing particulate material and condensing it onto a surface to form a layer provides a quantity of first particulate material in a first container and a quantity of second particulate material in a second container spaced apart from the first container, the first and second containers respectively having first and second openings. The first particulate material is transferred through the first opening in the first container into a manifold and vaporized in the manifold. The second particulate material is transferred through the second opening in the second container into the manifold and vaporized in the manifold, whereby the first and second vaporized particulate materials are mixed. The mixed vaporized materials are delivered from the manifold to the surface to form the layer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.