Delivering particulate material to a vaporization zone
US7501152B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 20, 2005 |
| Grant date | Mar 10, 2009 |
| Priority date | — |
| Expiry date | Apr 27, 2027 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C14/12
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method for vaporizing particulate materials and condensing them onto a surface to form a layer provides a quantity of particulate material in a first container having an opening, dimensioned to allow free flow of the particulate material through the opening. The particulate material is transferred through the opening to an auger. At least a portion of the auger is rotated to transfer the particulate material from the first container along a feeding path to a vaporization zone where at least a component portion of the particulate material is vaporized and delivered to the surface to form the layer. The auger size is selected to facilitate the free flow of the particulate material through the opening.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.