Optical micro-spectrometer
US7502109B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 16, 2006 |
| Grant date | Mar 10, 2009 |
| Priority date | — |
| Expiry date | Oct 26, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2021/651
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical spectrometer having a multi-wafer structure. The structure may be fabricated with MEMS technology. The spectrometer may be integrated with a fluid analyzer. A reflective grating such as a diffraction or holographic grating situated on the circumference of a Rowland circle along with a point of light emission and a detector may be a configuration of the spectrometer. Some configurations may use an external light source where the light may be optically conveyed to the point of emission on the circle. There may be a Raman configuration where an interaction of light with a sample or an interactive film of a channel in a fluid analyzer is the point of light emission for the spectrometer. In some configurations of the spectrometer, the grating and/or the film may be reflective or transmissive.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.