Highly sensitive accelerometer
US7503215B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 13, 2007 |
| Grant date | Mar 17, 2009 |
| Priority date | — |
| Expiry date | Jul 13, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01V2210/1427
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Accelerometers for determining acceleration and methods of fabricating an accelerometer are disclosed. In one embodiment, the accelerometer includes a frame, a mass movably suspended on the frame, a fixed element having a rounded surface that does not move with respect to the frame, a movable element having a rounded surface that moves with the mass, and a sensing coil of optical waveguide wrapped around the rounded surfaces to detect movement of the mass in response to acceleration based on interferometric sensing of a change in length of the sensing coil. A method of fabricating the accelerometer includes suspending the mass in the frame and wrapping the optical waveguide around the rounded surfaces. Sensitivity and low fabrication cost of the accelerometers enables their use for integration within an ocean bottom seismic cable. Further, the accelerometer may be an in-line or a cross-line accelerometer depending on the arrangement within the frame.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.