Pressure sensor using near net shape sintered ceramics
US7503220B2 · kind B2 · utility
11Cited by
9References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 24, 2007 |
| Grant date | Mar 17, 2009 |
| Priority date | — |
| Expiry date | Apr 24, 2027 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB33Y80/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive pressure sensor is formed with sensor body and diaphragm components made of near net shapeable sintered ceramic. In one configuration, the differential pressure sensor has two sintered ceramic cell halves with an internal sintered ceramic diaphragm captured between the two cell halves. In another configuration, two side-by-side sintered ceramic cell halves have individual sintered ceramic diaphragms, and the chambers of the two cell halves are connected by metal tubing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.