Apparatus and method for cleaning glass substrates using a cool hydrogen flame
US7504267B2 · kind B2 · utility
4Cited by
6References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 20, 2002 |
| Grant date | Mar 17, 2009 |
| Priority date | — |
| Expiry date | Nov 20, 2022 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S438/906
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Contaminants from surfaces of temperature sensitive substrates, such as glass substrates are removed by exposing the surfaces to a hydrogen Surface-mixed diffusion flame for a predetermined duration of time. The predetermined duration of time being insufficient to heat up the surfaces substantially thereby causing damage to the temperature sensitive substrates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.