Electrochemically fabricated microprobes

US7504840B2 · kind B2 · utility

Assignee

• Microfabrica Inc. · US

Inventors

• Vacit Arat · La Cañada Flintridge, US
• Adam L. Cohen · San Fernando, US
• Dennis R. Smalley · Santa Clarita, US
• Ezekiel J. J. Kruglick · San Diego, US
• Richard T. Chen · Burbank, US
• Kieun Kim · Los Angeles, US

Key dates

• Filing date: Oct 6, 2005
• Grant date: Mar 17, 2009
• Expiry date: Oct 6, 2025

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R3/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Multilayer test probe structures are electrochemically fabricated via depositions of one or more materials in a plurality of overlaying and adhered layers. In some embodiments each probe structure may include a plurality of contact arms or contact tips that are used for contacting a specific pad or plurality of pads wherein the arms and/or tips are configured in such away so as to provide a scrubbing motion (e.g. a motion perpendicular to a primary relative movement motion between a probe carrier and the IC) as the probe element or array is made to contact an IC, or the like, and particularly when the motion between the probe or probes and the IC occurs primarily in a direction that is perpendicular to a plane of a surface of the IC. In some embodiments arrays of multiple probes are provided and even formed in desired relative position simultaneously.