Optical metrology system
US7505152B2 · kind B2 · utility
0Cited by
4References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 24, 2005 |
| Grant date | Mar 17, 2009 |
| Priority date | — |
| Expiry date | Apr 16, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01S17/89
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An optical metrology system having an optical metrology sensor assembly and a target is disclosed. The optical metrology sensor assembly transmits a light beam to the target and then uses the reflected beam from the target to determine the position of the target in three dimensions. The optical metrology sensor can comprise a light source, a ranging device, and a two-dimensional sensor. The optical metrology system is suitable for applications such as determining the position, orientation, and shape of a spacecraft antenna, so as to facilitate movement thereof to enhance operation of the antenna.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.