MEMS micromotor and timepiece equipped with this micromotor
US7505373B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 13, 2007 |
| Grant date | Mar 17, 2009 |
| Priority date | — |
| Expiry date | Nov 13, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH02N1/008
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
The invention proposes a MEMS micromotor produced in a plate made of crystalline or amorphous material, in particular based on silicon, which comprises a lower layer forming a substrate, and an upper layer in which at least one actuator and a rotor is etched, the actuator driving the rotor in rotation about a shaft (64), characterized in that the shaft (64) is connected to the plate, in that the shaft (64) extends axially through a hole of the plate, and in that the shaft (64) is clamped in the hole and centered in the hole by means of elastic fixing structures which are produced by etching in the substrate and which are arranged on the circumference of the hole.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.