Apparatus and method for breaking up and merging polygons
US7506300B2 · kind B2 · utility
199Cited by
12References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 13, 2005 |
| Grant date | Mar 17, 2009 |
| Priority date | — |
| Expiry date | Jan 24, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70441
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method of modifying polygons in a data set mask-less or mask based optical projection lithography includes: 1) mapping the data set to a figure-of-demerit; 2) moving individual polygon edges to decrease the figure-of-demerit; and 3) disrupting the set of polygons to enable a further decrease in the figure-of-demerit, wherein disrupting polygons includes any of the following polygon disruptions: breaking up, merging, or deleting polygons.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.