Camera based two-point vision alignment for semiconductor device testing handlers
US7506451B1 · kind B1 · utility
8Cited by
4References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 23, 2008 |
| Grant date | Mar 24, 2009 |
| Priority date | — |
| Expiry date | May 23, 2028 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R31/2893
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A guiding plate based vision alignment system for a test handler includes cameras, configured to view the position difference between a tested device and the corresponding contactor. A pick-and-place handler is configured to move the device. A guiding plate is configured to actuate guiding plate with one translation alignment feature and one rotation alignment feature to correct the position offset between the tested device and the corresponding contactor.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.