Method of manufacturing a flexible thin film transistor array panel including plastic substrate
US7507616B2 · kind B2 · utility
11Cited by
2References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 3, 2006 |
| Grant date | Mar 24, 2009 |
| Priority date | — |
| Expiry date | Jan 15, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D86/60
Abstract
A method of manufacturing a flexible display is provided, which includes forming a gate line including a gate electrode on a substrate, sequentially depositing a gate insulating layer covering the gate line, and a semiconductor layer, firstly etching the semiconductor layer; secondly etching the semiconductor layer, forming a data line including a source electrode, and a drain electrode on the semiconductor layer and the gate insulating layer; and forming a pixel electrode connected to the drain electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.