Preparation of organosilane esters
US7507850B2 · kind B2 · utility
8Cited by
11References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 4, 2005 |
| Grant date | Mar 24, 2009 |
| Priority date | — |
| Expiry date | Apr 4, 2025 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07F7/188
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
The present invention relates to a specific process for preparing organosilane esters of the formula (I) and a composition comprising more than 98% by weight of organosilane esters of the formula (I) and less than 2.0% by weight of at least one hydrocarbon and to the use of such a composition as precursor for producing a layer or film having a dielectric constant of 1<κ≦4.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.