Conductive and robust nitride buffer layers on biaxially textured substrates
US7510997B1 · kind B1 · utility
Assignees
Inventors
Key dates
| Filing date | Aug 17, 2004 |
| Grant date | Mar 31, 2009 |
| Priority date | — |
| Expiry date | Aug 17, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N60/0632
Abstract
The present invention relates to epitaxial, electrically conducting and mechanically robust, cubic nitride buffer layers deposited epitaxially on biaxially textured substrates such as metals and alloys. The invention comprises of a biaxially textured substrate with epitaxial layers of nitrides. The invention also discloses a method to form such epitaxial layers using a high rate deposition method as well as without the use of forming gases. The invention further comprises epitaxial layers of oxides on the biaxially textured nitride layer. In some embodiments the article further comprises electromagnetic devices which may have superconducting properties.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.