Plasma generating electrode inspection device
US7511810B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 23, 2007 |
| Grant date | Mar 31, 2009 |
| Priority date | — |
| Expiry date | Nov 9, 2027 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05H1/48
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention provides a plasma generating electrode inspection device capable of efficiently inspecting the parallelism, flatness, surface roughness, and dielectric strength of a plasma generating electrode. A plasma generating electrode inspection device 100 includes a reference quartz plate 2 provided with a film-shaped transparent conductor 1 disposed on one surface (outer surface 2a), a reference spacer 3 disposed on the outer edge of the other surface (inner surface 2b) of the reference quartz plate 2, a reference clamper 4 which can secure a plasma generating electrode 11 as an inspection target between the reference spacer 3 and the reference clamper 4, and a pulse power supply 5 capable of applying a pulse voltage between the transparent conductor 1 and the plasma generating electrode 11 as an inspection target while changing the voltage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.