Robust MEMS flow die with integrated protective flow channel
US7513149B1 · kind B1 · utility
Assignee
Inventor
Key dates
| Filing date | Nov 30, 2007 |
| Grant date | Apr 7, 2009 |
| Priority date | — |
| Expiry date | Nov 30, 2027 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F1/6842
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A MEMS flow sensor has a flow channel that avoids wire bond pads and ancillary circuit elements. A fluid can move from the bottom of the sensor substrate, though an inlet hole, over a sensing element on the top of the substrate, and then through an outlet hole. The inlet hole and the outlet hole can pass from the substrate top to the substrate bottom. A top cap can be fixed to the top of the substrate such that it covers the sensing element, the inlet hole, and the outlet hole. The top cap constrains the flow channel and keeps fluid, either gaseous or liquid, from exiting the channel and contacting the wire bond pads or ancillary circuit elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.